SEMI S2 - Environmental, Health and Safety of Semiconductor Production Equipment

　　Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment

　　The main considerations are as follows:

　　u9 Documents Provided to User (Documents provided to the user)

　　U10 Hazard Alert Labels (Hazard Warning Labels)

　　U11 Safety Interlock Systems (Safety Interlock)

　　U12 Emergency Shutdown (Emergency Shutdown)

　　U13 Electrical Design (Electrical Design)

　　U14 Fire Protection (Fire Protection)

　　U15 Process Liquid Heating Systems (Process Liquid Heating System)

　　U16 Ergonomics/Human Factors (Human Factors in Ergonomics)

　　U17 Hazardous Energy Isolation (Dangerous Energy Isolation)

　　U18 Mechanical Design (Mechanical Design)

　　U19 Seismic Protection (Earthquake Protection)

　　U20 Automated Material Handlers (Automatic Moving Machinery)

　　U21 Environmental Considerations (Environmental Impact)

　　U22 Exhaust Ventilation (Exhaust System)

　　U23 Chemicals (Chemicals)

　　U24 Ionizing Radiation (Ionizing Radiation)

　　U25 Non-Ionizing Radiation and Fields (Non-Ionizing Radiation and Fields)

　　u26 Lasers (Laser)

　　u27 Sound Pressure Level (Sound Pressure Level)

　　U28 Related Documents (Related Documents)