Semiconductor manufacturing equipment is high-precision equipment. During operation, it requires complex working conditions such as clean environment, constant temperature, high temperature, high pressure, vacuum, strong electromagnetic field, purging and cooling. In addition, core equipment operates almost 24 hours a day, 365 days a year, which undoubtedly results in extremely high energy consumption. Therefore, equipment energy efficiency has become one of the key indicators prioritized by wafer fabs.

SEMI S23 is the standard for evaluating the energy efficiency of semiconductor equipment. According to the standard, the energy consumption of various utilities under different modes is converted into equivalent electrical energy using corresponding conversion factors, so that the overall energy consumption of the equipment can be quantified, providing a basis for optimizing equipment energy efficiency.

ECMG is equipped with testing instruments that meet the requirements of the SEMI S23 standard, and our engineers have many years of extensive experience. We can assist equipment manufacturers in completing SEMI S23 certification.