The design of exhaust outlets for equipment containing special gases is a critical part that cannot be ignored.If gases inside the chamber are not exhausted in a timely manner through the ventilation system, or in the event of gas leakage, explosion and personnel poisoning may occur.

When conducting SEMI S6 testing, we must carry out measurements and evaluations with mature technologies and professional equipment.ECMG is equipped with test instruments that meet SEMI S6 requirements and has experienced engineers.We assist equipment manufacturers in completing gas tracer tests in accordance with the SEMI S6 standard.