+86-755-82984733
CN
SEMI Certification Product Certification Service Advantages
Home Our Services SEMI Certification

SEMI E78

 Electrostatic Discharge and Electrostatic Absorption Testing


In the semiconductor industry, most people are familiar with the term Electrostatic Discharge (ESD). Terms such as “ESD damage”, “electrostatic protection”, and “ESD breakdown” are frequently mentioned. Most people understand that electrostatic discharge is a form of destructive failure.
ESD damage is mostly caused by human factors, yet it is difficult to avoid. During the manufacturing, production, assembly, testing, storage, and handling of electronic components or systems, static electricity can accumulate on the human body, instruments, storage equipment, and even on the electronic components themselves. Without awareness, contact between these charged objects creates a discharge path, subjecting electronic components or systems to ESD damage.
There are three common ESD test models:Human Body Model (HBM), Machine Model (MM), and Charged Device Model (CDM).In the following sections, we will briefly introduce the principles of these three models.


image.png


Semiconductor electrostatic discharge mainly includes the above three models. What are the differences between them? We make the following comparison:：


Mode

Source of static electricity

Discharge current

Discharge time

Elimination method

Human Body Model - HBM

Human body

Weak

Long (more than one hundred nanoseconds)

Wear anti-static protective gear

Machine Mode - MM

Equipment, machine

Contents

Short (a few tens of nanoseconds)

Equipment grounding

Charge and Discharge Mode - CDM

Packaging materials, component friction

Strong

Extremely short (less than 10 nanoseconds)

The electrical equipment used is of high quality.


As the geometrical size of semiconductor products becomes smaller and smaller, the requirements for the process technology become higher and higher, and the sensitivity to static electricity becomes increasingly strict. According to the E78 standard, ECMG conducts testing and evaluation on semiconductor equipment to reduce the static electricity of the equipment, thereby improving the product qualification rate and assisting manufacturers in completing the SEMI E78 certification.

Previous：SEMI S23

Next：SEMI E176

Back to List