In order to reduce the risks of mechanical and electrical hazards in the semiconductor industry, a wide variety of prevention and management measures have been adopted. The most typical measure is that in the procurement of equipment, FAB factories list SEMI S2 safety standards certification and SEMI F47 voltage sag certification as mandatory specification requirements. Here, we will mainly explain to you what SEMIF47 voltage sag is, hoping that equipment manufacturers will have a clear understanding before implementation. 

SEMIF47 Specification for Voltage Sudden Drop Resistance Test of Semiconductor Equipment 

Specification for semiconductorprocessing equipment voltage sag immunity

Specific test specifications:

The input voltage of each phase is set at 50% of the rated voltage. For example, at 50Hz, the cycle time is 20ms, 10 cycles, and the test time for each is 200ms. Observe whether there are any abnormal conditions such as tripping or interruption in the equipment. 

The input voltage of each phase is set at 70% of the rated voltage. For example, at 50Hz, the cycle time is 20ms, 25 cycles, and the test time for each test is 500ms. Observe whether there are any abnormal conditions such as tripping or interruption in the equipment. 

The input voltage of each phase is set at 80% of the rated voltage. For example, at 50Hz, the cycle time is 20ms, 50 cycles, and the test time for each test is 1000ms. Observe whether there are any abnormal situations such as tripping or interruption in the equipment. 

In simple terms, it is to observe whether the equipment has the ability to withstand fluctuations in the power input ranging from 50%, 70% to 80%. 

The SEMIF47 IPC voltage sag test equipment is specially designed and provided by the PSL Power Standards Laboratory in the United States. The testers must hold qualification certificates. 

The IPC voltage sag generator is developed based on relevant international standards and is capable of generating precise and controlled voltage fluctuations on the AC circuit. It is mainly used to test the immunity of various loads to voltage fluctuations according to relevant standards, and to provide technical data support for improving their immunity to voltage fluctuations. Various test specifications such as SEMI F47 have been fully set up within the testing equipment. 

1. Main Functions and Features 

1.1 The IPC industrial voltage sag generator (sag generator) is a mobile electrical device; 

1.2 It can generate voltage drops and surges in single-phase, three-phase delta and three-phase star systems without the need for any external transformers. 

1.3 The pressure drop generator can operate normally within any nominal voltage range from 100 volts to 480 volts. 

1.4 The pressure drop generator can provide a continuous current of 200 amperes per phase with an effective value, and can also provide a peak current of 600 amperes per phase. The peak impulse current driving capacity is 1000A for a momentary period. 

1.5 The phase-to-phase voltage sag generated by the pressure drop generator is a genuine phase-to-phase sag, rather than being simulated by two phase-to-phase voltage sags. 

1.6 Automatic Setup of Test Conditions Equipment 

2. Technical parameters and performance requirements 

2.1 Voltage Sags and Rises Characteristics: 

The voltage drop generator can generate voltage drops ranging from 0% to 100% of the working voltage at intervals of 2.5%, and it can also generate voltage rises ranging from 100% to 125% at the same intervals. Moreover, it can produce voltage interruptions with high resistance values. 

During the period of temporary reduction, the voltage variation of non-temporary reduction phases is within ±10%. 

The duration of voltage sags and surges can be programmed: the minimum duration is one cycle (corresponding to 20ms for 50Hz), and the maximum duration is no less than 30 seconds. It can be adjusted flexibly within this range, with an adjustment step of one cycle. 

The voltage drop generator can start generating voltage drops at a programmable phase angle (0 - 360 degrees, with a step size of 5 degrees). 

When voltage sags or surges begin and end, there should be no discontinuities in voltage and current. 

According to the measurement method specified in IEC 61000-4-34, voltage sags and surges are applicable to one phase - neutral, or one phase - another phase. 

2.2 Data Recording Sampling Resolution: 12 bits or higher. 

The pressure drop generator should record the following waveforms and effective value readings: all phase-to-phase and phase-to-neutral input voltages, phase-to-phase and phase-to-neutral output voltages, phase input current and phase output current; the records include data before, during and after each voltage sag and rise, and the test curve graph is automatically generated by the equipment.

      Test Plot For Voltageand current waveforms:Voltage waveform10 cycle sag to 50％

        Voltage waveform 25cycle sag to 70％

      Voltage waveform 50 cycle sag to 80％

      ECMG is equipped with a complete set of IPC testing equipment, and the testers hold qualification certificates, enabling them to accurately and effectively conduct SEMI F47 voltage sag tests.

       ECMG Test Personnel Qualification Certificate:

      SEMI F47 Field Testing Application: